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Specialty Chemicals Update Program

Electronic Chemicals: Semiconductors, Silicon and IC Process Chemicals

Table of Contents

Section Page Number

Executive summary 10
Summary 11
United States 14
Europe 14
Japan 15
China 15
South Korea 16
Taiwan 16
Other Asia 16
Introduction 17
Abbreviations 19
Overview of the semiconductor industry 22
World overview 22
Semiconductor markets 22
Semiconductor manufacturing industry 23
Polysilicon and silicon wafer industry 25
Polysilicon 25
Manufacturers 25
Markets 26
Prices 26
Silicon wafers 26
Manufacturers 27
Regional overview 28
North America 28
Industry structure 28
United States 30
Canada and Mexico 30
Industry market trends 31
Europe 32
Industry structure 32
Industry market trends 36
Japan 37
Industry structure 37
Industry market trends 37
Electronic products 37
Semiconductors 39
China 40
South Korea 44
Taiwan 45
Other Asia 45
Overview of the IC process chemicals industry 47
United States 47
Structure of the industry 47
Company profiles 49
Cabot Microelectronics 49
DowDuPont Inc. 50
Dow Chemical Company 51
DuPont 52
Versum Materials, Inc. 52
Operating characteristics 54
Research and development 54
Manufacturing 54
Marketing 54
Cost structure and profitability 54
Government regulations 55
Trends and opportunities 56
Technology 56
Business 56
Critical factors for success 57
Europe 57
Structure of the industry 57
Company profile—Siltronic AG 59
Operating characteristics 60
Research and development 60
EU research programs 60
Company initiatives 61
Marketing 62
Cost structure and profitability 62
Government regulations 63
REACH 63
Restriction of the Use of Certain Hazardous Substances/Waste Electrical and Electronic Equipment directives 64
Trends and opportunities 65
Critical factors for success 67
Japan 68
Structure of the industry 68
Company profiles 69
JSR Corporation 69
Shin-Etsu Chemical Company, Ltd. 69
Sumitomo Chemical Co., Ltd. 70
Taiyo Nippon Sanso Corporation 71
Operating characteristics 72
Research and development 72
Manufacturing 72
Marketing 72
Cost structure and profitability 73
Government regulations 73
Trends and opportunities 73
Technology 73
Business 74
Critical factors for success 74
China 75
Structure of the industry 75
Operating characteristics 75
Government regulations 75
Critical factors for success 77
South Korea 77
Taiwan 77
Other Asia 77
Semiconductor manufacturing 78
Semiconductor substrates 78
Processing steps 79
Deposition 80
Patterning/photolithography 80
Removal (etching and chemical mechanical planarization) 81
Modification of electrical properties/implantation 81
Technology trends 81
IC process chemicals—product types and functions 83
Polycrystalline silicon 83
Silicon wafers 84
Atmospheric and specialty gases 85
Blanket and carrier gases 86
Etchant and cleaning gases 86
Dopant gases containing group III/V elements 87
Precursors for silicon, tungsten, and titanium compounds 87
Reactants and other semiconductor processes using specialty gases 88
DUV lithography 88
Photoresists 89
Photoresist ancillaries 90
Chemical mechanical planarization (CMP) slurries 91
Wet-processing chemicals 92
Thin film metals (metal sputtering) 96
Dielectric materials 97
Low-k dielectric materials 97
High-k dielectric materials/metal gates 98
Copper plating chemicals 99
Markets for IC process chemicals by region 101
United States 101
Summary 101
Silicon 101
Consumption and markets 101
Market participants 101
Prices 103
Atmospheric and specialty gases 103
Consumption and markets 103
Market participants 104
Prices 105
Photoresists 105
Consumption and markets 105
Market participants 106
Prices 107
Photoresist ancillaries 107
Consumption and markets 107
Market participants 107
Chemical mechanical planarization (CMP) slurries 108
Consumption and markets 108
Market participants 109
CMP prices 109
Wet-processing chemicals 110
Consumption and markets 110
Market participants 110
Thin film metals (metal sputtering) 111
Consumption and markets 111
Market participants 111
Prices 112
Low-k dielectric materials 112
Consumption and markets 112
Market participants 112
High-k dielectric materials 113
Consumption and markets 113
Market participants 113
Copper plating chemicals 114
Consumption and markets 114
Market participants 114
Europe 115
Summary 115
Silicon 116
Production, consumption, and markets 116
Market participants 116
Prices 118
Atmospheric and specialty gases 118
Consumption and markets 118
Market participants 120
Prices 121
Photoresists and ancillary chemicals 121
Consumption and markets 121
Market participants 122
Prices 123
Chemical mechanical planarization (CMP) slurries 123
Consumption and markets 123
Market participants 124
Prices 124
Wet-processing chemicals 125
Consumption and markets 125
Market participants 125
Prices 126
Thin film metals (metal sputtering) 127
Consumption and markets 127
Market participants 127
Prices 127
Low-k dielectric materials 127
Consumption and markets 128
Market participants 128
Prices 128
High-k dielectric materials 128
Consumption and markets 128
Market participants 128
Copper plating chemicals 129
Consumption and markets 129
Market participants 129
Japan 130
Summary 130
Silicon 130
Consumption and markets 131
Market participants 134
Prices 136
Atmospheric and specialty gases 136
Consumption and markets 136
Market participants 138
Prices 139
Photoresists 140
Consumption and markets 140
Market participants 141
Prices 142
Photoresist ancillaries 142
Consumption and markets 143
Market participants 143
Chemical mechanical planarization (CMP) slurries and pads 143
Consumption and markets 143
Market participants 143
Prices 144
Wet-processing chemicals 145
Consumption and markets 145
Market participants 146
Prices 147
Thin film metals (metal sputtering) 148
Consumption and markets 148
Market participants 148
Prices 149
Other materials 149
Consumption and markets 150
Market participants 150
Prices 151
China 151
Summary 152
Silicon 152
Consumption and markets 152
Market participants 152
Prices 154
Atmospheric and specialty gases 154
Consumption and markets 155
Market participants 155
Prices 155
Photoresists and photoresist ancillaries 156
Consumption and markets 156
Market participants 156
Prices 157
Chemical mechanical planarization (CMP) slurries 157
Consumption and markets 157
Market participants 157
Prices 157
Wet-processing chemicals 157
Consumption and markets 158
Market participants 158
Prices 159
Thin film metals (metal sputtering) 159
Market participants 159
Prices 160
Other materials 160
South Korea 160
Summary 160
Silicon 160
Consumption and markets 161
Market participants 161
Prices 161
Atmospheric and specialty gases 161
Consumption and markets 161
Market participants 161
Prices 162
Photoresists and ancillary chemicals 163
Consumption and markets 163
Market participants 164
Prices 164
Chemical mechanical planarization (CMP) slurries 165
Consumption and markets 165
Market participants 165
Prices 165
Wet-processing chemicals 166
Consumption and markets 166
Market participants 166
Prices 167
Thin film metals (metal sputtering) 167
Consumption and markets 167
Market participants 167
Prices 168
Other materials 168
Consumption and markets 168
Market participants 169
Prices 169
Taiwan 170
Summary 170
Silicon 170
Consumption and markets 170
Market participants 170
Prices 171
Atmospheric and specialty gases 171
Consumption and markets 171
Market participants 171
Prices 172
Photoresists and ancillary chemicals 172
Consumption and markets 172
Market participants 173
Prices 173
Chemical mechanical planarization (CMP) slurries 174
Consumption and markets 174
Market participants 174
Prices 174
Wet-processing chemicals 175
Consumption and markets 175
Market participants 175
Prices 175
Thin film metals (metal sputtering) 176
Consumption and markets 176
Market participants 176
Prices 176
Other materials 177
Consumption and markets 177
Market participants 177
Prices 178
Other Asia 178
Summary 179
Silicon 179
Consumption and markets 179
Market participants 179
Prices 179
Atmospheric and specialty gases 180
Consumption and markets 180
Market participants 180
Prices 180
Photoresists and ancillary chemicals 181
Consumption and markets 181
Market participants 182
Prices 182
Chemical mechanical planarization (CMP) slurries 182
Consumption and markets 182
Market participants 182
Prices 183
Wet-processing chemicals 183
Consumption and markets 183
Market participants 183
Prices 184
Thin film metals (metal sputtering) 184
Consumption and markets 184
Market participants 184
Prices 185
Other materials 185
Consumption and markets 185
Market participants 186
Prices 186

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